Material Analysis using XDAL 237

Application

Material Analysis
Analysis of very thin coatings of 0.1 m (0.004 mils)
Measurements of functional coatings in the electronics and semiconductor industries
Determination of complex multi-coating systems
Automated measurements, e.g., in quality control
Determination of the lead content in solder

Features

The FISCHERSCOPE X-RAY XDAL 237 is a universally applicable energy dispersive x-ray fluorescence measuring instrument. It is especially well suited for non-destructive measurements and analysing very thin coatings, even with very complex compositions or small concentrations as well as automated measurement tasks. With its fast, programmable XY-stage, it is the fitting measuring instrument for automated measurements in quality assurance and production monitoring.

Design

The FISCHERSCOPE X-RAY XDAL 237 is designed as a user-friendly bench-top instrument. It is equipped with a high-precision, programmable XY-stage and an electrically driven Z-axis. The sample stage moves into the loading position automatically, when the protective hood is opened. A laser pointer serves as a positioning aid and supports the quick alignment of the sample to be measured.

Specification

Intended use Energy dispersive x-ray fluorescence measuring instrument (EDXRF) to determine thin coatings, trace elements and alloys.
Element range Aluminum Al (13) to Uranium U (92) up to 24 elements simultaneously.
Design Bench-top unit with hood opening upwards XY-stage and Z-axis electrically driven and programmable Motor-driven changeable apertures and filters Video camera and laser pointer (class 1) for orienting the sample
Measurement direction Top down

X-Ray Detection

X-ray detector Silicon PIN detector with peltier cooling
Resolution (fwhm for Mn-K) 200 eV
Measuring distance 0 80 mm (0 3.2 in) Distance compensation with patented DCM method for simplified measurements at varying distances. For particular applications or for higher demands on accuracy an additional calibration might be necessary.

X-Ray

Source

X-ray Tube X-ray tube Micro-focus tungsten tube with beryllium window
Aperture 4x changeable: 0.1 mm (3.9 mils), 0.3 mm (11.8 mils), 0.6 mm (23.6 mils), slot 0.5 x 0.15 mm (19.7 x 5.9 mils), others on request
Primary filter 3x changeable (Standard configuration: Nickel, Aluminium, no filter)
Measuring distance Depending on the measuring distance and on the aperture, the actual measurement spot size is shown in the video image. Smallest measurement spot: approx. 0.15 mm (5.9 mils) with aperture 0.1 mm (3.9 mils)

Sample Stage

Dimensions

External dimensions Width x depth x height [mm] 570 x 760 x 650 mm, [in]: 22 x 30 x 26
Weight approx. 115 kg (52 lb)
Inner dimensions meas.chamber Width x depth x height [mm]460 x 495 x 146 mm, [in]: 18 x 19.5 x 5.7