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- Measurements on very small flat components and structures such as printed circuit boards, contacts or lead frames
- Analysis of very thin coatings, e.g., gold/palladium coatings of 0.1 m (0.004 mils)
- Measurement of functional coatings in the electronics and semiconductor industries
- Determination of complex multi-coating systems
- Automated measurements, e.g., in quality control
General Specification
Intended use:Energy dispersive x-ray fluorescence measuring instrument (EDXRF) to measure thin coatings and coating systems on very small flat structures.
Element range:Aluminum Al (13) to Uranium U (92) up to 24 elements simultaneously.
Design:Bench-top unit with hood opening upwards and housing with a slot on the side.
X/Y- and Z-axis electrically driven and programmable
Motor-driven changeable filters
Measuring direction:Top down
X-Ray Source/Detection
X-ray tube:Standard: Micro focus tube with tungsten target and beryllium window
Optional: Micro focus tube with molybdenum target and beryllium window
High voltage:Three steps: 10 kV, 30 kV, 50 kV
Primary filter:4x changeable: Ni 10 m (0.4 mils); free; Al 1000 m (40 mils); Al 500 m (20 mils)
X-ray optics:Polycapillary
| X-Ray Source/Detection | |||
|---|---|---|---|
|
| Standard Non halo-free | Option 20 m Halo-free | Option 10 m Non halo-free |
| Measurement spot, fwhm at Mo-K | appr. 20 m (0.8 mils) | appr. 20 m (0.8 mils) | appr. 10 m (0.4 mils) |
| X-ray detector | Peltier-cooled silicon-drift-detector (SDD) | Peltier-cooled silicon-drift-detector (SDD) | Peltier-cooled silicon-drift-detector (SDD) |
| Effective detector area | 20 mm2 (0.03 in2) | 50 mm2 (0.08 in2) | 50 mm2 (0.08 in2) |
For halo-free capillaries, the radiation intensity for all energies of the x-radiation is concentrated on the nominal measurement spot. For capillaries,indicated as non halofree,radiation intensity with high energies (E > 20 keV) can cover a significantly larger area than the nominal measurement spot.
Sample Alignment
Video Microscope:High-resolution CCD color camera for optical monitoring of the measurement location along the primary beam axis, manual focusing and auto-focus, Crosshairs with a calibrated scale (ruler) and spot-indicator, Adjustable LED illumination, Laser pointer (class 1) to support
accurate specimen placement.
Zoom factor:Up to 1080x (Optical: 30x, 90x, 270x; Digital: 1x, 2x, 3x, 4x)
X-Ray Detection
X-ray detector:Proportional counter tube
Absorber:XULM 240 only: optional cobalt or nickel absorber
Measuring distance:0 25 mm (0 1 in)
Distance compensation with patented DCM method for simplified measurements at varying distances. For particular applications or for higher demands on accuracy an additional calibration might be necessary.
Evaluation Unit
Computer:Windows-PC
Software:Standard: Fischer WinFTM LIGHT
Optional: Fischer WinFTM BASIC, PDM, SUPER
Sample support stage
| Sample Stage | ||
|---|---|---|
|
| Standard | Option Supporting Plate PCB |
| Design | Fast, programmable XY-stage with pop-out function | Fast, programmable XY-stage with pop-out function and large placement area for measurements on PCBs |
| Usable sample placement area | Width x depth: 370 mm x 320 mm (14.6 in x 12.6 in) | Width x depth: 620 mm x 530 mm (24.4 in x 20.9 in) |
| Usable maximum travel | X/Y-axis: 250 mm x 220 mm (9.8 in x 8.7 in) Z-axis: 140 mm (5.5 in) | X/Y-axis: 250 mm x 220 mm (9.8 in x 8.7 in) Z-axis: 140 mm (5.5 in) |
| Max. travel speed X/Y | 60 mm/s (0.2 ft/s) | 60 mm/s (0.2 ft/s) |
| Repeatability precision X/Y | unidirectional: 5 m (0.2 mils) max., 2 m (0.08 mils) typ. | unidirectional: 5 m (0.2 mils) max., 2 m (0.08 mils) typ. |
| Max. sample weight | 5 kg (11 lb), with reduced precision max. 20 kg (44 lb) | 5 kg (11 lb), with reduced precision max. 20 kg (44 lb) |
| Max. sample height | 135 mm (5.3 in) | 135 mm (5.3 in) |
Electrical Data
Power supply:AC 115 V or AC 230 V 50 / 60 Hz
Power consumption:max. 120 W, without evaluation PC
Protection class:IP40
Dimensions
External dimensions:Width x depth x height [mm]: 660 x 835 x 720 mm (26 x 33 x 28.3 in)
Weight:Approx. 135 kg (297 lb)
Interior dimensions of Width x depth x height: 580 x 560 x 145 mm (22.8 x 22 x 5.7 in)
chamber:
Environmental Conditions
Operating temperature:10 C 40 C / 50 F 104 F
Storage/Transport0 C 50 C / 32 F 122 F
temperature:
Admissible air humidity: 95 %, non-condensing
Standards
CE approval:EN 61010
X-Ray standards:DIN ISO 3497 and ASTM B 568
Approval:Fully protected instrument with type approval according to the German regulations.
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