Wafer Coating Thickness Measurement Using XUV 773

Applications

Wafer Coating Thickness Measurement
Analysis and coating thickness measurement on thin coatings like CIGS, CIS, CdTe
Analysis and coating thickness measurement on functional coatings and in electronic and semiconductor industries
Non-destructive analysis of gold, jewellery and gem stones
Trace analysis and harmful substance analysis, RoHS, WEEE

Features

The FISCHERSCOPE X-RAY XUV 773 is an universally applicable energy dispersive Xray measuring instrument. It is ideally suited for non-destructive analysis of thin coatings, traces and light elements. Up to 24 elements in the range of sodium (11) to uranium (92) can be determined simultaneously. Measurements can be performed in vacuum, in ambient air or with helium purge (optional). Therefore also organic or wet samples can be analyzed.

Design

The XUV 773 is a bench top unit. It is equipped with a high-precision, programmable XY-stage and an electrically driven Z-axis. The cylindrical measurement chamber opens motorized and the wide front opening simplifies sample placing. Inside of the spacious vacuum chamber voluminous or unevenly formed parts can be easily analysed. The XUV 773 can be equipped with a helium option. This enables for the measurement of wet samples, liquids or biological samples purged with helium.

Specification

Intended use Energy dispersive X-ray fluorescence measuring instrument (EDXRF) to analyze thin coatings, small structures, trace elements and alloys.
Element range Sodium Na (11) to Uranium U (92) up to 24 elements simultaneously.
Design Bench top unit with motorized opening cylindrical vacuum chamber. External vacuum pump , Helium purge of measurement chamber (optional),  Programmable motorized X/Y/Z sample stage
Measurement direction Top Down

X-Ray Source

X-ray tube Micro focus X-ray tube with Rhodium target (Tungsten, Molybdenum, or other target materials as option)
Aperture (Collimator) 4x changeable: 0.1 mm (3.9 mils), 0.3 mm (11.8 mils), 1 mm (39.4 mils), 3 mm (118 mils), others on demand.
Primary filter 6x changeable: Ni 10 m (0.39 mils), free, Al 1000 m (39.4 mils), Al 500 m (19.7 mils), Al 100 m (3.94 mils), Mylar 100 m (3.94 mils.
Measurement spot size Depends on measurement distance and used aperture. Real spot size is displayed on the video screen. Smallest measurement spot: approx. 0.15 mm (5.9 mils).

X-Ray Detection

X-ray detector SDD Silicon Drift Detector, peltier-cooled
Resolution ( 140 eV)
Measuring distance 0 20 mm (0 0.8 in), Distance compensation with patented DCM method for simplified measurements at varying distances. For particular applications an additional calibration might be necessary.

Sample Stage

Design Fast motorized and programmable X/Y/Z sample stage
Max. sample weight 1 kg (2.2 lb)
Max. sample height 100 mm (3.94 in

Dimensions

External dimensions Width x depth x height [mm] 640 x 640 x 760 mm, [in]: 25.2 x 25.2 x 29.2
Weight approx. 182 kg (401 lb)
Inner dimensions meas.chamber 400 x 390, [in]: 15.8 x 15.3