Wafer and Lead Frame Coating Thickness Measurement

Applications

Analysis of very thin coatings, e.g., gold/palladium coatings of 0.1 m
Trace analysis on pc boards according to RoHS and WEEE requirements
Wafer Coating
Lead Frames
Gold analysis
Measurement of functional coatings in the electronics and semiconductor industries
Determination of complex multi-coating systems
Automated measurements, e.g., in quality control

Features

The FISCHERSCOPE X-RAY XDV-SDD is an universally applicable energy-dispersive Xray fluorescence measuring instrument. It is especially well suited for measuring and analyzing very thin coatings or small concentrations in the trace analysis. With its high-precision, programmable XY-stage, it is the fitting measuring instrument for automated sample measurements.

Design

The XDV-SDD is designed as a user-friendly bench-top instrument. It is equipped with a high-precision, programmable XY-stage and an electrically driven Z-axis. The sample stage moves into the loading position automatically, when the protective hood is opened. A laser pointer serves as a positioning aid and supports the quick alignment of the sample to be measured. The integrated video-microscope with zoom and crosshairs simplifies sample placement and allows precise measuring spot adjustment.

Specification

Intended use Energy dispersive X-ray fluorescence measuring instrument (EDXRF) to determine thin coatings, Gold testing , trace elements and alloys Element range Aluminium Al (13) to Uranium U (92) up to 24 elements simultaneously
Design Bench top unit with hood opening upwards, X/Y- and Z-axis electrically driven and programmable, Motor-driven changeable apertures and filters, Video camera and laser pointer (class 1) for positioning the sample
Measurement direction From top to bottom

X-Ray Source

X-ray tube Micro focus tube with tungsten target and beryllium window Aperture (Collimator) 4x changeable 0.2 mm (7.9 mils), 0,6 mm (23.6 mils), 1 mm (39.4 mils), 3 mm (118 mils), others on request
Primary filter 6x changeable (Ni, free, Al 1000 m (39.4 mils), Al 500 m (19.7 mils), Al 100 m (3.9 mils), Mylar 100 m (3.9 mils)
Measurement spot sizeDepending on measurement distance and aperture Measurement spot size aperture size + 10% The actual measurement spot size is shown in the video image. Smallest measurement spot: approx. 0.25 mm (9.8 mils)

X-Ray Detection

X-ray detector Silicon Drift Detector (SDD), peltier-cooled
Resolution (fwhm for Mn-K) 140 eV
Measuring distance 0 80 mm (0 3.1 in) Distance compensation with patented DCM method for simplified measurements at varying distances

Sample Stage

 Design Fast, programmable XY-stage with pop-out function
Usable sample placement area 370 x 320 mm (14.6 x 12.6 in)
Max. sample weight5 kg (11 lb), with reduced approach travel precision 20 kg (44 lb)
Max. sample height 140 mm (5.5 in)
Max. Travel X/Y-axis: 250 mm x 250 mm (9.8 x 9.8 in); Z-axis: 140 mm (5.5 in)
Max. travel speed X/Y 60 mm/s (0.2 ft/s)
Repeatability precision X/Y unidirectional 5 m (0.2 mils) max., 2 m (0.08 mils) typ.

Dimensions

External dimensions Width x depth x height [mm] 660 x 835 x 720 mm, [in]: 26 x 32.9 x 28.3
Weight approx. 140 kg (308 lb)
Inner dimensions meas.chamber Width x depth x height [mm] 580 x 560 x 145 mm, [in]: 22.8 x 22 x 5.7