Coating Thickness
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Fischer measurement Technologies (India) Pvt. Ltd.

X-ray Fluorescence Instrument XUV 773

Wafer coating thickness Fluorescence Instrument - XUV 773 is the most preferred devices of clients with precise design and exceptional accuracy. The range comes with vacuum chamber for non-destructive coating thickness measurement as well as material analysis. Designed as per the international industrial standards, the X Ray Fluorescence Instrument is used for non-destructive study of thin coatings, traces and light elements. 24 elements in the assortment of sodium (11) to uranium (92) can be easily determined concurrently. Ergonomically designed, they are ideal for the measurement performed in vacuum, with helium purge (optional) or in ambient air.

Typical areas of application are:

  • Analysis of very thin coatings of  0.1m (0.004 mils)

  • Automated measurements

  • Determination of complex multi-coating systems and lead content in solder

  • Measurements of functional coatings in the electronics and semiconductor industries

  • Element range:Sodium Na (11) to Uranium U (92) €“ up to 24 elements simultaneously.

  • Intended use: Energy dispersive X-ray fluorescence measuring instrument (EDXRF) coatings, small structures, trace elements and alloys.

  • Design:Bench top unit with motorized opening cylindrical vacuum chamber.
    External vacuum pump.Helium purge of measurement chamber (optional) Programmable motorized X/Y/Z sample stage
    High resolution color video camera with a wide magnification range.

  • Measuring direction:Top down

X-Ray Source

  • X-ray tube:Micro focus X-ray tube with Rhodium target
    (Tungsten, Molybdenum, or other target materials as option)

  • High voltage:Three steps: 8 kV, 20 kV, 50 kV

  • Aperture (Collimator):4x changeable: ˜ 0.1 mm (3.9 mils), ˜ 0.3 mm (11.8 mils),˜ 1 mm (39.4 mils), ˜ 3 mm (118 mils), others on demand

  • Primary filter:6x changeable: Ni 10 m (0.39 mils), free, Al 1000 m (39.4 mils), Al 500 m (19.7 mils), Al 100 m (3.94 mils), Mylar 100 m (3.94 mils)

  • Measurement spot:Depends on measurement distance and used aperture.
    Real spot size is displayed on the video screen.
    Smallest measurement spot: approx.  0.15 mm (5.9 mils).

X-Ray Detection

  • X-ray detector: SDD Silicon Drift Detector, peltier-cooled

  • Resolution (fwhm for Mn-K±): 140 eV

  • Measurement distance:0  20 mm (0 - 0.8 in), Distance compensation with patented DCM method
    for simplified measurements at varying distances. For particular applications
    an additional calibration might be necessary.

Sample Alignment

  • Video microscope:High-resolution CCD color camera for optical monitoring of the
    measurement location along the primary beam axis, manual focusing and auto-focus, crosshairs with a calibrated scale (ruler) and spot-indicator,adjustable LED illumination of the measurement, Laser pointer (class 1) to support accurate sample placement.

  • Video magnification factor:20x … 180x (optical: 20x … 45x; digital: 1x, 2x, 3x, 4x)

Sample Stage

  • Design:Fast motorized and programmable X/Y/Z sample stage

  • Travel distance:X-/ Y-/ Z-axis [mm]:100 x 100 x 100, [in]: 3.94 x 3.94 x 3.94

  • Repeatability precision XY:  0,01 mm (0.39 mils), uni-directional

  • Support area:Width x depth [mm]: 135 x 135, [in]: 5.31 x 5.31

  • Max. sample weight: 1 kg (2.2 lb)

  • Max. sample height:100 mm (3.94 in)

Electrical Data

  • Power supply: AC 115 V or AC 230 V 50 / 60 Hz

  • Power consumption: Max. 120 W ,without evaluation PC

  • Protection class: IP40

Dimensions

  • External dimensions:Width x depth x height [mm]: 640 x 640 x 760 mm, [in]: 25.2 x 25.2 x 29.2

  • Interior dimensions of chamber: Diameter x depth [mm]: 400 x 390, [in]: 15.8 x 15.3

  • Weight: approx. 182 kg (401 lb)

Environmental Conditions

  • Operating temperature: 10oC -“ 40oC (50oF -“ 104oF) around the housing

  • Storage temperature: 0oC -“ 50oC (32oF -“ 122oF)

  • Admissible air humidity:  95 %, non-condensing

Evaluation Unit

  • Computer:Windows-PC

  • Software:Standard: Fischer WinFTM BASIC including PDM
    Optional: Fischer WinFTM SUPER

Standards

  • CE approval: EN 61010

  • X-Ray standards: DIN ISO 3497 and ASTM B 568

  • Approval: Individual acceptance inspection as a fully protected instrument according to the German regulations , Deutsche Rontgenverordnung-RoV".