Coating Thickness
Call Me Free
Fischer measurement Technologies (India) Pvt. Ltd.

Wafer Coating Thickness Instrument XDV-U

Coating thickness gauge for electroplating and electroless coatings XDV-µ or X-Ray Fluorescence Tester is available in various technical specifications. These are widely used for non-destructive analyses and measurements of coating thickness on very small components and structures, even with complex coating systems.

Applications

  • Measurements on very small flat components and structures such as printed circuit boards, contacts or lead frames
  • Analysis of very thin coatings, e.g., gold/palladium coatings of ≤ 0.1 μm (0.004 mils)
  • Measurement of functional coatings in the electronics and semiconductor industries
  • Determination of complex multi-coating systems
  • Automated measurements, e.g., in quality control

General Specification

Intended use:Energy dispersive x-ray fluorescence measuring instrument (EDXRF) to measure thin coatings and coating systems on very small flat structures.

Element range:Aluminum Al (13) to Uranium U (92) – up to 24 elements simultaneously.

Design:Bench-top unit with hood opening upwards and housing with a slot on the side.

X/Y- and Z-axis electrically driven and programmable

Motor-driven changeable filters

Measuring direction:Top down

X-Ray Source/Detection

X-ray tube:Standard: Micro focus tube with tungsten target and beryllium window

Optional: Micro focus tube with molybdenum target and beryllium window

High voltage:Three steps: 10 kV, 30 kV, 50 kV

Primary filter:4x changeable: Ni 10 μm (0.4 mils); free; Al 1000 μm (40 mils); Al 500 μm (20 mils)

X-ray optics:Polycapillary

X-Ray Source/Detection


Standard Non halo-free

Option 20 μm Halo-free

Option 10 μm Non halo-free

Measurement spot, fwhm at Mo-Kα

appr. Ø 20 μm (0.8 mils)

appr. Ø 20 μm (0.8 mils)

appr. Ø 10 μm (0.4 mils)

X-ray detector

Peltier-cooled silicon-drift-detector (SDD)

Peltier-cooled silicon-drift-detector (SDD)

Peltier-cooled silicon-drift-detector (SDD)

Effective detector area

20 mm2 (0.03 in2)

50 mm2 (0.08 in2)

50 mm2 (0.08 in2)

For halo-free capillaries, the radiation intensity for all energies of the x-radiation is concentrated on the nominal measurement spot. For capillaries,indicated as non halofree,radiation intensity with high energies (E > 20 keV) can cover a significantly larger area than the nominal measurement spot.

Sample Alignment

Video Microscope:High-resolution CCD color camera for optical monitoring of the measurement location along the primary beam axis, manual focusing and auto-focus, Crosshairs with a calibrated scale (ruler) and spot-indicator, Adjustable LED illumination, Laser pointer (class 1) to support

accurate specimen placement.

Zoom factor:Up to 1080x (Optical: 30x, 90x, 270x; Digital: 1x, 2x, 3x, 4x)

X-Ray Detection

X-ray detector:Proportional counter tube

Absorber:XULM 240 only: optional cobalt or nickel absorber

Measuring distance:0 … 25 mm (0 … 1 in)

Distance compensation with patented DCM method for simplified measurements at varying distances. For particular applications or for higher demands on accuracy an additional calibration might be necessary.

Evaluation Unit

Computer:Windows®-PC

Software:Standard: Fischer WinFTM® LIGHT

Optional: Fischer WinFTM® BASIC, PDM®, SUPER

Sample support stage

Sample Stage


Standard

Option Supporting Plate PCB

Design

Fast, programmable XY-stage with pop-out function

Fast, programmable XY-stage with pop-out function and large placement area for measurements on PCBs

Usable sample placement area

Width x depth: 370 mm x 320 mm (14.6 in x 12.6 in)

Width x depth: 620 mm x 530 mm (24.4 in x 20.9 in)

Usable maximum travel

X/Y-axis: 250 mm x 220 mm (9.8 in x 8.7 in) Z-axis: 140 mm (5.5 in)

X/Y-axis: 250 mm x 220 mm (9.8 in x 8.7 in) Z-axis: 140 mm (5.5 in)

Max. travel speed X/Y

60 mm/s (0.2 ft/s)

60 mm/s (0.2 ft/s)

Repeatability precision X/Y

unidirectional: ≤ 5 μm (0.2 mils) max., ≤ 2 μm (0.08 mils) typ.

unidirectional: ≤ 5 μm (0.2 mils) max., ≤ 2 μm (0.08 mils) typ.

Max. sample weight

5 kg (11 lb), with reduced precision max. 20 kg (44 lb)

5 kg (11 lb), with reduced precision max. 20 kg (44 lb)

Max. sample height

135 mm (5.3 in)

135 mm (5.3 in)


Electrical Data

Power supply:AC 115 V or AC 230 V 50 / 60 Hz

Power consumption:max. 120 W, without evaluation PC

Protection class:IP40

Dimensions

External dimensions:Width x depth x height [mm]: 660 x 835 x 720 mm (26 x 33 x 28.3 in)

Weight:Approx. 135 kg (297 lb)

Interior dimensions of chamber: Width x depth x height: 580 x 560 x 145 mm (22.8 x 22 x 5.7 in)

Environmental Conditions

Operating temperature:10 °C – 40 °C / 50 °F – 104 °F

Storage/Transport temperature:0 °C – 50 °C / 32 °F – 122 °F

Admissible air humidity:≤ 95 %, non-condensing

Standards

CE approval: EN 61010

X-Ray standards:DIN ISO 3497 and ASTM B 568

Approval:Fully protected instrument with type approval according to the German regulations.